JPS623280A - 回折格子露光装置 - Google Patents
回折格子露光装置Info
- Publication number
- JPS623280A JPS623280A JP14231885A JP14231885A JPS623280A JP S623280 A JPS623280 A JP S623280A JP 14231885 A JP14231885 A JP 14231885A JP 14231885 A JP14231885 A JP 14231885A JP S623280 A JPS623280 A JP S623280A
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- laser beams
- diffraction grating
- light
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009826 distribution Methods 0.000 claims abstract description 32
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 238000005259 measurement Methods 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 4
- 238000012937 correction Methods 0.000 abstract description 8
- 230000004907 flux Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005305 interferometry Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Automatic Focus Adjustment (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Holo Graphy (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14231885A JPS623280A (ja) | 1985-06-28 | 1985-06-28 | 回折格子露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14231885A JPS623280A (ja) | 1985-06-28 | 1985-06-28 | 回折格子露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS623280A true JPS623280A (ja) | 1987-01-09 |
| JPH0323883B2 JPH0323883B2 (en]) | 1991-03-29 |
Family
ID=15312565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14231885A Granted JPS623280A (ja) | 1985-06-28 | 1985-06-28 | 回折格子露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS623280A (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02287501A (ja) * | 1989-04-28 | 1990-11-27 | Shimadzu Corp | 露光装置 |
| JPH0572405A (ja) * | 1991-09-11 | 1993-03-26 | Toppan Printing Co Ltd | 回折格子プロツター |
| WO2013084906A1 (ja) * | 2011-12-09 | 2013-06-13 | 株式会社 日立ハイテクノロジーズ | 露光装置、及び構造の生産方法 |
| US10388098B2 (en) | 2014-02-07 | 2019-08-20 | Korea Institute Of Machinery & Materials | Apparatus and method of processing anti-counterfeiting pattern, and apparatus and method of detecting anti-counterfeiting pattern |
-
1985
- 1985-06-28 JP JP14231885A patent/JPS623280A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02287501A (ja) * | 1989-04-28 | 1990-11-27 | Shimadzu Corp | 露光装置 |
| JPH0572405A (ja) * | 1991-09-11 | 1993-03-26 | Toppan Printing Co Ltd | 回折格子プロツター |
| WO2013084906A1 (ja) * | 2011-12-09 | 2013-06-13 | 株式会社 日立ハイテクノロジーズ | 露光装置、及び構造の生産方法 |
| JPWO2013084906A1 (ja) * | 2011-12-09 | 2015-04-27 | 株式会社日立ハイテクノロジーズ | 露光装置、及び構造の生産方法 |
| US9104118B2 (en) | 2011-12-09 | 2015-08-11 | Hitachi High-Technologies Corporation | Exposure device and method for producing structure |
| US10388098B2 (en) | 2014-02-07 | 2019-08-20 | Korea Institute Of Machinery & Materials | Apparatus and method of processing anti-counterfeiting pattern, and apparatus and method of detecting anti-counterfeiting pattern |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0323883B2 (en]) | 1991-03-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6172373B1 (en) | Stage apparatus with improved positioning capability | |
| KR100381763B1 (ko) | 경사조정장치,면위치조정장치,이면위치조정장치를구비한노광장치,및이들장치를이용하여제조된디바이스 | |
| JPH043008A (ja) | 投影露光方法およびその装置 | |
| JPH0827444B2 (ja) | オフ・セット鏡の光軸を決めるための方法および装置 | |
| JPH0122977B2 (en]) | ||
| JPH01123238A (ja) | 光学系の結像特性に対する環境パラメーターの影響を補正する方法および装置 | |
| JPS623280A (ja) | 回折格子露光装置 | |
| JPS6336526A (ja) | ウエハ露光装置 | |
| JP2671338B2 (ja) | 露光方法及び基板の姿勢制御方法 | |
| JPS63168502A (ja) | 干渉計の調整装置 | |
| JPH1058174A (ja) | レーザ加工装置 | |
| JP2555051B2 (ja) | パタ−ン検出方法及びその装置 | |
| JPH0774089A (ja) | 投影露光装置 | |
| JP2689264B2 (ja) | 回折格子縞露光装置におけるレーザー光の方向調整方法およびその装置 | |
| JPH095055A (ja) | 面傾斜検出装置 | |
| JPH11281319A (ja) | 光学素子の位置設定装置、及び光学素子の位置設定方法 | |
| JP2003124093A (ja) | ギャップ調節装置及び調節方法 | |
| JP3192461B2 (ja) | 光学的測定装置 | |
| JPH09260259A (ja) | 投影露光方法及び装置 | |
| JP2985687B2 (ja) | 非接触平行調整方法 | |
| JP3206464B2 (ja) | 基板の姿勢制御方法、装置及び露光方法、露光装置 | |
| JPH0217626A (ja) | 縮小投影露光装置 | |
| JPH03291554A (ja) | 試料固定型ｘ線回折装置の光軸調整方法および装置 | |
| JPH0548085Y2 (en]) | ||
| JPH01179320A (ja) | 荷電ビーム露光装置のビーム位置補正方法 |